Accession Number : ADA620978


Title :   Mems-Based Waste Vibration and Acoustic Energy Harvesters


Descriptive Note : Master's thesis


Corporate Author : NAVAL POSTGRADUATE SCHOOL MONTEREY CA


Personal Author(s) : Householder, Timothy J


Full Text : http://www.dtic.mil/get-tr-doc/pdf?AD=ADA620978


Report Date : Dec 2014


Pagination or Media Count : 89


Abstract : Every machine vibrates and emits noise. This is unused energy that, with an appropriate mechanism, can be returned to the system. Utilizing an array of piezoelectric microelectromechanical systems (MEMS) devices to harvest this otherwise wasted energy, it is possible to improve the efficiency of any number of mechanical devices. Piezoelectricity is the mechanism by which certain crystalline structures generate electric potential when under strain, or, conversely, deform when subjected to an electric potential. It is this first effect that is important to this application. Though each MEMS device will generate a very small amount of power, a 1 m2 area can contain an array of millions of these devices. Energy harvesting, conservation, and efficiency are all key Department of Defense (DOD) priorities, and the universal application of these devices make them ideal for any expeditionary platform, such as ships, aircraft, and automobiles. This thesis designs and tests the first generations of acoustic and vibrational piezoelectric MEMS devices; including time-dependent finite element models, microfabrication processes, and the initial attempts at characterization and optimization.


Descriptors :   *ENERGY HARVESTING , *MICROELECTROMECHANICAL SYSTEMS , *PIEZOELECTRIC MATERIALS , ACOUSTIC MEASUREMENT , ACOUSTIC RESONATORS , ACOUSTIC WAVES , ALTERNATING CURRENT , ALUMINUM OXIDES , ATOMIC SPECTROSCOPY , CONSERVATION , CRYSTAL STRUCTURE , EFFICIENCY , ELECTRICITY , FABRICATION , FINITE ELEMENT ANALYSIS , MATHEMATICAL MODELS , MICROMINIATURIZATION , MODAL ANALYSIS , POISSON RATIO , SILICON DIOXIDE , SILICON ON INSULATOR , SUBSTRATES , THESES , TIME DEPENDENCE , VIBRATION , VOLTAGE , X RAY DIFFRACTION


Subject Categories : Physical Chemistry
      Electrical and Electronic Equipment
      Acoustics
      Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE