Accession Number : ADA601119


Title :   Investigation of Influence of Gas Ratio on the Electron Temperature in TiN Magnetron Sputtering Deposition System


Descriptive Note : Conference paper


Corporate Author : SHAHID BEHESHTI UNIV TEHRAN (IRAN)


Personal Author(s) : Ghasemi, S ; Ghomi, H R ; Niknam, A R ; Latifi, H


Full Text : http://www.dtic.mil/get-tr-doc/pdf?AD=ADA601119


Report Date : Jul 2013


Pagination or Media Count : 4


Abstract : In this work, a nanolayer of titanium nitride which produced by the magnetron sputtering system is synthesized. Moreover the effect of plasma parameters on the electron temperature is studied. Electron temperature has a significant effect on the plasma coating system properties. The results show that, increasing the working pressure and nitrogen ratio in the system causes decreasing electron temperature.


Descriptors :   *ELECTRONS , MAGNETRONS , NITRIDES , PLASMAS(PHYSICS) , SPUTTERING , TEMPERATURE , TITANIUM


Subject Categories : Nuclear Physics & Elementary Particle Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE