Accession Number : ADA523557


Title :   Encapsulated Ball Bearings for Rotary Micro Machines


Descriptive Note : Journal article


Corporate Author : MARYLAND UNIV COLLEGE PARK DEPT OF ELECTRICAL AND COMPUTER ENGINEERING


Personal Author(s) : Waits, C M ; Geil, Bruce ; Ghodssi, Reza


Full Text : http://www.dtic.mil/dtic/tr/fulltext/u2/a523557.pdf


Report Date : Jan 2007


Pagination or Media Count : 7


Abstract : We report on the first encapsulated rotary ball bearing mechanism using silicon microfabrication and stainless steel balls. The method of capturing stainless steel balls within a silicon race to support a silicon rotor both axially and radially is developed for rotary micro machines and MEMS ball bearing tribology studies. Initial demonstrations show speeds up to 6.8 krpm without lubrication, while speeds up to 15.6 krpm with lubrication are possible. Qualitative analysis is used to explain start-up behavior and investigate the wear of the stainless steel ball and silicon race.


Descriptors :   *BALL BEARINGS , FABRICATION , ENCAPSULATION , MICROELECTROMECHANICAL SYSTEMS , MICROMINIATURIZATION , REPRINTS , TRIBOLOGY


Subject Categories : Electrical and Electronic Equipment
      Fabrication Metallurgy
      Mfg & Industrial Eng & Control of Product Sys
      Machinery and Tools


Distribution Statement : APPROVED FOR PUBLIC RELEASE