Accession Number : ADA430925


Title :   Modeling, Fabrication, and Testing of a Piezoelectric MEMS Vibrational Energy Reclamation Device


Descriptive Note : Annual rept.


Corporate Author : ARMY RESEARCH LAB ADELPHI MD


Personal Author(s) : Pulskamp, Jeffrey S


Full Text : http://www.dtic.mil/dtic/tr/fulltext/u2/a430925.pdf


Report Date : Feb 2005


Pagination or Media Count : 21


Abstract : A piezoelectric vibrational energy reclamation device using sol-gel PZT/surface micromachining technology is described for the low power supply of microsystems; converting environmental vibration into useful electrical energy for powering microsystems. The design is appropriate for the power generation of low power remote MEMS sensor network nodes. Electro-mechanical modeling, fabrication, and testing of PZT MEMS are presented. Power generation of 1.54 mW/sq. cm at 700 Hz/50 micrometers amplitude is predicted.


Descriptors :   *VIBRATION , *PIEZOELECTRICITY , *MICROELECTROMECHANICAL SYSTEMS , LOW POWER , ENERGY , POWER SUPPLIES , ELECTRIC POWER PRODUCTION , RECLAMATION , MICROPOWER CIRCUITS , LEAD ZIRCONATE TITANATES , MICROMACHINING


Subject Categories : Non-electrical Energy Conversion
      Electricity and Magnetism


Distribution Statement : APPROVED FOR PUBLIC RELEASE